Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10468368
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Filing Dt:
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08/19/2003
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Publication #:
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Pub Dt:
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04/15/2004
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Inventors:
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Osamu Suenaga, Sadao Kobayashi, Naoki Mori, Hiromu Ito
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Title:
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Exhaust heat utilization system, exhaust heat utilization method, and semiconductor production facility
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-6, AKASAKA 5-CHOME |
MINATO-KU, TOKYO, JAPAN |
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25-1, NISHI-SHINJUKU 1-CHOME |
SHINJUKU-KU, TOKYO 163-0606, JAPAN |
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CROWELL & MORING |
INTELLECTUAL PROPERTY GROUP |
P.O. BOX 14300 |
WASHINGTON, DC 20044-4300 |
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