Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/29/2005
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Application #:
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10467385
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Filing Dt:
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07/28/2003
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Publication #:
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Pub Dt:
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04/15/2004
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Inventors:
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Shinichiro Noudo, Kumiko Oguni, Hiroyuki Nakano, Hiroki Hane
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Title:
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EXPOSURE METHOD USING COMPLEMENTARY DIVIDED MASK, EXPOSURE APPARATUS, SEMICONDUCTOR DEVICE, AND METHOD OF PRODUCING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-35 KITASHINAGAWA 6-CHOME, SHINAGAWA-KU |
| TOKYO, JAPAN |
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| HOLLAND & KNIGHT LLC |
| ROBERT J DEPKE |
| 131 SOUTH DEARBORN STREET, 30TH FLOOR |
| CHICAGO, IL 60603 |
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