Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/20/2007
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Application #:
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10686584
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Filing Dt:
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10/17/2003
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Publication #:
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Pub Dt:
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04/22/2004
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Inventors:
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Shunji Maeda, Yasuhiko Nakayama, Minoru Yoshida, Hitoshi Kubota, Kenji Oka
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Title:
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MANUFACTURING METHOD OF SEMICONDUCTOR SUBSTRATE AND METHOD AND APPARATUS FOR INSPECTING DEFECTS OF PATTERNS OF AN OBJECT TO BE INSPECTED
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Assignment:
1
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 1753 SHIMONUMABE, NAKAHARA-KU |
| KAWASAKI-SHI |
| KANAGAWA, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 N. 17TH STREET, SUITE 1800 |
| ARLINGTON, VIRGINIA 22209 |
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