Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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10377471
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Filing Dt:
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02/27/2003
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Publication #:
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Pub Dt:
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04/22/2004
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Inventors:
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Jung-wook Lim, Sun-jin Yun
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Title:
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METHOD FOR FORMING INTROGEN-CONTAINING OXIDE THIN FILM USING PLASMA ENHANCED ATOMIC LAYER DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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161 GAJEONG-DONG YUSONG-GU |
DAEJEON-CITY, KOREA, REPUBLIC OF |
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BLAKELY SOKOLOFF TAYLOR, ET AL. |
ERIC S. HYMAN |
12400 WILSHIRE BOULEVARD |
7TH FLOOR |
LOS ANGELES, CA 90025 |
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