Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10278640
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Filing Dt:
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10/23/2002
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Publication #:
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Pub Dt:
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04/29/2004
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Inventors:
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Peter L. Kellerman, Kevin T. Ryan, Robert J. Mitchell
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Title:
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Electrostatic chuck wafer port and top plate with edge shielding and gas scavenging
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 55 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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| KILLWORTH, GOTTMAN, HAGAN & SCHAEFF, LLP |
| BRIAN L. SMILER |
| ONE DAYTON CENTER |
| ONE SOUTH MAIN STREET, SUITE 500 |
| DAYTON, OH 45402 |
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