Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10282388
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Filing Dt:
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10/29/2002
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Publication #:
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Pub Dt:
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04/29/2004
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Inventors:
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Simon Chooi, Mei Sheng Zhou, Subhash Gupta
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Title:
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Deposition of barrier metal in damascene interconnects using metal carbonyl
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 60 WOODLANDS INDUSTRIAL PARK D |
| STREET 2 |
| SINGAPORE 738406, SINGAPORE |
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| GEORGE O. SAILE |
| 28 DAVIS AVENUE |
| POUGHKEEPSIE, NEW YORK 12603 |
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