Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/06/2008
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Application #:
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10471289
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Filing Dt:
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09/22/2003
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Publication #:
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Pub Dt:
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05/13/2004
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Inventors:
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Tomoyuki Ishii, Masahiro Numakura
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Title:
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SEMICONDUCTOR PRODUCTION SYSTEM, CLUSTER TOOL, CONTROL METHOD OF SEMICONDUCTOR PRODUCTION SYSTEM AND MAINTENANCE METHOD OF CLUSTER TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-8481 |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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