Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/29/2008
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Application #:
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10472849
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Filing Dt:
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09/26/2003
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Publication #:
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Pub Dt:
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05/20/2004
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Inventors:
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Tadahiro Ohmi, Masaki Hirayama, Shigetoshi Sugawa, Tetsuya Goto
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Title:
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DEVICE AND CONTROL METHOD FOR MICRO WAVE PLASMA PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-17-301 KOMEGAFUKURO 2-CHOME AOBA-KU |
| SENDAI-SHI |
| MIYAGI 980-0813, JAPAN |
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, ET AL. |
| ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005-3315 |
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