Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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10300898
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Filing Dt:
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11/21/2002
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Publication #:
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Pub Dt:
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05/27/2004
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Inventor:
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Stephen Roux
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Title:
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METHOD AND APPARATUS FOR ISOLATING LIGHT SOURCE GAS FROM MAIN CHAMBER GAS IN A LITHOGRAPHY TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 1110 |
| VELDHOVEN, NETHERLANDS 5503 LA |
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| STERNE, KESSLER, GOLDSTEIN & FOX PLLC |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| STERNE, KESSLER, GOLDSTEIN & FOX PLLC |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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