Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10302375
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Filing Dt:
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11/22/2002
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Publication #:
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Pub Dt:
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05/27/2004
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Inventors:
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Wen H. Zhu, Tzu-Fang Huang, Lihua Li, Li-Qun Xia, Ellie Y. Yieh
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Title:
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Method for curing low dielectric constant film by electron beam
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PO BOX 450-A |
| SANTA CLARA, CA 95052 |
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