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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10714773
Filing Dt:
11/17/2003
Publication #:
Pub Dt:
06/03/2004
Inventor:
Hiroshi Yoshino
Title:
Forming method of resist pattern for improving accuracy of dimension of pattern, manufacturing method of semiconductor apparatus using the same and heat treatment apparatus for the same
Assignment: 1
Reel/Frame:
014710/0645Recorded: 11/17/2003Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
11/10/2003
Assignee:
2-1, YAESU 2-CHOME
CHUO-KU
TOKYO, JAPAN
Correspondent:
HAYES SOLOWAY P.C.
NORMAN P. SOLOWAY
130 W. CUSHING STREET
TUSCON, AZ 85701

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