Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10320842
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Filing Dt:
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12/16/2002
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Publication #:
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Pub Dt:
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06/17/2004
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Inventors:
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Hongwen Yan, David M. Dobuzinsky, Brian L. Ji, Richard Wise
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Title:
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Magnetic mirror for preventing wafer edge damage during dry etching
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| INTERNATIONAL BUSINESS MACHINES CORPORAT |
| DEPT. 18G |
| BLDG. 300-482 |
| 2070 ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533 |
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