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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/11/2006
Application #:
10642680
Filing Dt:
08/19/2003
Publication #:
Pub Dt:
06/17/2004
Inventors:
Ryouichi Inanami, Atsushi Ando, Kazuhiro Nakai, Yoshikazu Ichioka
Title:
METHOD FOR CREATING CHARGED-PARTICLE-BEAM EXPOSURE DATA, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND PROGRAM
Assignment: 1
Reel/Frame:
014883/0472Recorded: 01/14/2004Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/05/2003
Exec Dt:
12/05/2003
Exec Dt:
12/08/2003
Exec Dt:
12/08/2003
Assignees:
1-1, SHIBAURA 1-CHOME, MINATO-KU
TOKYO, JAPAN
1-1, TENJINKITAMACHI, HORIKAWADORI-TERANOUCHIAGARU
4-CHOME
KAMIGYO-KU, KYOTO-SHI, KYOTO, JAPAN
Correspondent:
FINNEGAN HENDERSON FARABOW ET AL.
RICHARD V. BURGUJIAN
1300 I STREET, N.W.
WASHINGTON, DC 20005-3315

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