Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/12/2005
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Application #:
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10325673
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Filing Dt:
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12/19/2002
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Publication #:
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Pub Dt:
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06/24/2004
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Inventors:
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Vedapuram S. Achutharaman, Juan Chacin, Hali Forstner
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Title:
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METHOD AND APPARATUS FOR PLANARIZATION OF A MATERIAL BY GROWING A SACRIFICIAL FILM WITH CUSTOMIZED THICKNESS PROFILE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| POST OFFICE BOX 450-A |
| LEGAL AFFIARS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| PATENT COUNSEL |
| LEGAL AFFAIRS DEPT. |
| POST OFFICE BOX 450-A |
| SANTA CLARA, CA 95052 |
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