Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10321565
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Filing Dt:
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12/18/2002
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Publication #:
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Pub Dt:
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06/24/2004
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Inventors:
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Chun-Feng Nieh, Ching-Fan Wang, Fung-Hsu Cheng, Zhen-Long Chen
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Title:
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Method of etching a low-k dielectric layer
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 16, CREATION RD. |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN CHU, TAIWAN R.O.C. |
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| BIRCH, STEWART, KOLASCH ET AL. |
| MCKINNEY MUNCY |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 3, LI-HSIN RD. II |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN R.O.C. |
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| J.C. PATENTS |
| JIAWEI HUANG |
| 4 VENTURE, SUITE 250 |
| IRVINE, CA 92618 |
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