Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/27/2007
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Application #:
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10735621
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Filing Dt:
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12/16/2003
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Publication #:
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Pub Dt:
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07/01/2004
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Inventors:
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Akira Shimizu, Yuhsuke Fukuoka, Yasushi Fujioka, Katsushi Kishimoto, Katsuhiko Nomoto
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Title:
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PLASMA CVD APPARATUS, AND METHOD FOR FORMING FILM AND METHOD FOR FORMING SEMICONDUCTOR DEVICE USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 22-22, NAGAIKECHO, ABENO-KU, OSAKA-SHI |
| OSAKA, JAPAN 545-8522 |
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| NIXON & VANDERHYE P.C. |
| H. WARREN BURNAM, JR. |
| 1100 NORTH GLEBE ROAD |
| 8TH FLOOR |
| ARLINGTON, VA 22201 |
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