Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10703205
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Filing Dt:
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11/05/2003
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Publication #:
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Pub Dt:
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07/08/2004
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Inventors:
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Pai-Hsueh Yang, Bausan Yuan, Susumu Makinouchi, Yoshiji Itakura, Kazuhiro Hirano et al
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Title:
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Control system and method for improving tracking accuracy of a stage through processing of information from previous operations
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3 MARUNOUCHI, 3-CHOME |
| CHIYODAS-KU |
| TOKYO, JAPAN 100-8331 |
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| THE LAW OFFICE OF STEVEN G. ROEDER |
| STEVEN G. ROEDER |
| 5560 CHELSEA AVENUE |
| LA JOLLA, CA 92037 |
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