Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/21/2006
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Application #:
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10754997
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Filing Dt:
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01/10/2004
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Publication #:
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Pub Dt:
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07/22/2004
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Inventors:
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Hung Chih Chen, John M. White, Shijian Li, Fred C. Redeker, Ramin Emami
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Title:
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VIBRATION DAMPING IN A CHEMICAL MECHANICAL POLISHING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| BRENDA M. LEEDS BINDER |
| FISH & RICHARDSON P.C. |
| 500 ARGUELLO STREET |
| SUITE 500 |
| REDWOOD CITY, CA 94063 |
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