Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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10753557
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Filing Dt:
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01/09/2004
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Publication #:
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Pub Dt:
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07/29/2004
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Inventor:
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Sherman K. Poultney
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Title:
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TAILORED REFLECTING DIFFRACTOR FOR EUV LITHOGRAPHIC SYSTEM ABERRATION MEASUREMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 1110 |
5503 LA VELDHOVEN, NETHERLANDS |
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STERNE KESSLER, GOLDSTEIN & FOX PLLC |
GEORGE S. BARDMESSEER |
1100 NEW YORK, AVENUE N.W. |
WASHINGTON, DC 20005-3934 |
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