Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/22/2007
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Application #:
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10754280
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Filing Dt:
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01/08/2004
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Publication #:
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Pub Dt:
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08/05/2004
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Inventors:
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Daniel J. Hofman, Jennifer Y. Sun, Senh Thach, Yan Ye
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Title:
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PLASMA REACTOR WITH OVERHEAD RF SOURCE POWER ELECTRODE WITH LOW LOSS, LOW ARCING TENDENCY AND LOW CONTAMINATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PO BOX 450-A |
| SANTA CLARA, CALIFORNIA 95035 |
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| APPLIED MATERIALS, INC. |
| PO BOX 450-A |
| SANTA CLARA, CA 95035 |
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