Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/28/2006
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Application #:
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10778620
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Filing Dt:
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02/13/2004
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Publication #:
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Pub Dt:
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08/19/2004
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Inventors:
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Daniel Hoffman, Jang Gyoo Yang, Douglas A. Buchberger, JR., Douglas Burns
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Title:
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PLASMA REACTOR WITH OVERHEAD RF SOURCE POWER ELECTRODE HAVING A RESONANCE THAT IS VIRTUALLY PRESSURE INDEPENDENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| PATENT COUNSEL, M/S 2061 |
| SANTA CLARA, CALIFORNIA 95035 |
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| APPLIED & MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PATENT COUNSEL, M/S 2061 |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95035 |
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