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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10366727
Filing Dt:
02/14/2003
Publication #:
Pub Dt:
08/19/2004
Inventors:
Chi-I Lang, Seon-Mee Cho, Peter Wai-Man Lee
Title:
Method for depositing a low-k material having a controlled thickness range
Assignment: 1
Reel/Frame:
013777/0793Recorded: 02/14/2003Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/11/2003
Exec Dt:
02/13/2003
Exec Dt:
02/11/2003
Assignee:
3050 BOWERS AVENUE
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
PATENT COUNSEL, P.O. BOX 450A
SANTA CLARA, CA 95052

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