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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10378628
Filing Dt:
03/05/2003
Publication #:
Pub Dt:
09/09/2004
Inventors:
Ryoji Nishio, Ken Yoshioka, Saburou Kanai, Tadamitsu Kanekiyo, Hideki Kihara, Koji Okuda
Title:
Plasma processing apparatus and method
Assignment: 1
Reel/Frame:
014116/0866Recorded: 05/29/2003Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/26/2003
Exec Dt:
02/26/2003
Exec Dt:
02/26/2003
Exec Dt:
02/26/2003
Exec Dt:
02/26/2003
Exec Dt:
02/26/2003
Assignee:
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU
TOKYO, JAPAN
Correspondent:
ANTONELLI, TERRY, STOUT & KRAUS, LLP
MELVIN KRAUS
1300 N. SEVENTEENTH STREET
STE. 1800
ARLINGTON, VA 22209

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