Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/18/2008
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Application #:
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10640577
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Filing Dt:
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08/14/2003
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Publication #:
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Pub Dt:
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09/16/2004
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Inventors:
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Vaidyanathan Balasubramaniam, Koichiro Inazawa, Rich Wise, Arpan P. Mahorowala et al
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Title:
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METHOD AND APPARATUS FOR MULTILAYER PHOTORESIST DRY DEVELOPMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107, JAPAN |
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| PILLSBURY WINTHROP LLP |
| DALE S. LAZAR |
| INTELLECTUAL PROPERTY GROUP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| PILLSBURY WINTHROP LLP |
| DALE S. LAZAR |
| P.O. BOX 10500 |
| INTELLECTUAL PROPERTY GROUP |
| MCLEAN, VA 22102 |
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