Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10656628
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Filing Dt:
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09/05/2003
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Publication #:
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Pub Dt:
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09/23/2004
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Inventors:
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Yoshihide Senzaki, Carl Anthony Barelli, Joseph Charles Sisson, Dana Teasdale
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Title:
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Low temperature deposition of silicon based thin films by single-wafer hot-wall rapid thermal chemical vapor deposition
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 440 KINGS VILLAGE ROAD |
| SCOTTS VALLEY, CALIFORNIA 95066 |
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| DORSEY & WHITNEY LLP |
| MARIA S. SWIATEK |
| FOUR EMBARCADERO CENTER, STE. 3400 |
| SAN FRANCISCO, CA 94111-4187 |
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