Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10765296
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Filing Dt:
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01/27/2004
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Publication #:
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Pub Dt:
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09/23/2004
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Inventors:
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Soo Sik Yoon, Geun Young Yeom, Nae Eung Lee, Ki Joon Kim, Chang Hyun Oh, Ji Hwang Kim
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Title:
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Cleaning method of apparatus for manufacturing semiconductor device
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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49 NUNGPYONG-RI, OPO-UP |
KWANGJU-SHI |
GYEONGGI-DO, 464-892, KOREA, REPUBLIC OF |
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BAKER & DANIELS |
KEVIN R. ERDMAN |
300 NORTH MERIDIAN STREET, SUITE 2700 |
INDIANAPOLIS, IN 46204 |
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