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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
12/16/2008
Application #:
10736782
Filing Dt:
12/17/2003
Publication #:
Pub Dt:
09/23/2004
Inventors:
Yoshiki Igarashi, Koichiro Inazawa, Kimihiro Higuchi, Vaidyanathan Balasubramaniam et al
Title:
METHOD AND APPARATUS FOR BILAYER PHOTORESIST DRY DEVELOPMENT
Assignment: 1
Reel/Frame:
015364/0602Recorded: 05/25/2004Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/15/2004
Exec Dt:
03/22/2004
Exec Dt:
02/29/2004
Exec Dt:
01/05/2004
Exec Dt:
01/15/2004
Exec Dt:
01/21/2004
Exec Dt:
01/05/2004
Exec Dt:
01/05/2004
Assignee:
3-6, AKASAKA 5-CHOME
MINATO-KU, TOKYO, JAPAN 107
Correspondent:
PILLSBURY WINTHROP LLP
JEFFREY D. KARCESKI
P.O. BOX 10500
MCLEAN, VA 22102

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