Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/10/2007
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Application #:
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10767316
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Filing Dt:
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01/28/2004
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Publication #:
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Pub Dt:
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09/23/2004
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Inventors:
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Parthiv S. Patel, Joseph E. Conway, Muljadi Tantra, Jeffrey W. Moen et al
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Title:
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PROCESS MONITORING SYSTEM FOR LITHOGRAPHY LASERS
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Assignment:
1
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| INTELLECTUAL PROPERTY DEPT MS/4-2D |
| SAN DIEGO, CALIFORNIA 92127 |
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| CYMER, LLC |
| 17075 THORNMINT COURT |
| INTELLECTUAL PROP DEPT - MS/4-2D |
| SAN DIEGO, CA 92127 |
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