Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10820782
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Filing Dt:
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04/09/2004
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Publication #:
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Pub Dt:
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10/14/2004
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Inventors:
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Hirofumi Tsuchiyama, Shinji Nishihara, Masahiro Aoyagi
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Title:
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Manufacturing method of semiconductor device, automatic operation method and automatic operation system of semiconductor manufacturing apparatus, and automatic operation method of CMP apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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751 HORIGUCHI, HITACHINAKA-SHI |
IBARAKI, JAPAN 312-0034 |
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REED SMITH LLP |
STANLEY P. FISHER |
3110 FAIRVIEW PARK DRIVE |
SUITE 1400 |
FALLS CHURCH, VA 22042 |
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05/05/2024 02:39 AM
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