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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/23/2010
Application #:
10427308
Filing Dt:
04/30/2003
Publication #:
Pub Dt:
11/04/2004
Inventors:
Almuth Behrisch, Thomas Darnhofer-Demar, Hans-Peter Erb
Title:
ADVANCED PROCESS CONTROL METHOD AND ADVANCED PROCESS CONTROL SYSTEM FOR ACQUIRING PRODUCTION DATA IN A CHIP PRODUCTION INSTALLATION
Assignment: 1
Reel/Frame:
014164/0313Recorded: 06/13/2003Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/20/2003
Exec Dt:
05/19/2002
Exec Dt:
05/22/2002
Assignee:
ST.-MARTIN-STR. 53
81669 MUNCHEN, GERMANY
Correspondent:
BRIGGS AND MORGAN, P.A.
JEFFREY R. STONE
2200 IDS CENTER
80 SOUTH EIGHTH STREET
MINNEAPOLIS, MN 55402

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