Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10783087
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Filing Dt:
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02/23/2004
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Publication #:
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Pub Dt:
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11/18/2004
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Inventors:
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Ralph Kurt, Michael Cornelis Van Beek, Antonie Ellert Duisterwinkel, Erik Rene Kieft et al
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Title:
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Method and device for measuring contamination of a surface of a component of a lithographic apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 |
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| PILLSBURY WINTHROP LLP |
| EMILY T. BELL |
| P.O. BOX 10500 |
| INTELLECTUAL PROPERTY GROUP |
| MCLEAN, VA 22102 |
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