Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/06/2007
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Application #:
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10491764
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Filing Dt:
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04/02/2004
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Publication #:
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Pub Dt:
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12/16/2004
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Inventors:
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Andrey Yakshin, Eric Louis, Frederik Bijkerk, Marco Wedowski, Roman Klein, Frank Stietz
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Title:
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OPTICAL ELEMENT AND METHOD FOR ITS MANUFACTURE AS WELL AS LITHOGRAPHY APPARATUS AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 |
| OBERKOCHEN, GERMANY 73447 |
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| DANIEL J. HUDAK, JR. |
| 2020 FRONT STREET, SUITE 307 |
| CUYAHOGA FALLS, OH 44221 |
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