Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/26/2008
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Application #:
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10488406
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Filing Dt:
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03/03/2004
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Publication #:
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Pub Dt:
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12/16/2004
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Inventors:
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Takehiko Orii, Masaru Amai
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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| SMITH, GAMBRELL & RUSSELL |
| 1850 M STREET, N.W. |
| SUITE 800 |
| WASHINGTON, D.C. 20036 |
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