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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/31/2006
Application #:
10824272
Filing Dt:
04/14/2004
Publication #:
Pub Dt:
12/30/2004
Inventors:
Masanori Honda, Yoshiki Kino
Title:
TEMPERATURE ADJUSTMENT APPARATUS, EXPOSURE APPARATUS HAVING THE SAME, AND DEVICE FABRICATING METHOD
Assignment: 1
Reel/Frame:
015737/0562Recorded: 08/26/2004Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/25/2004
Exec Dt:
07/12/2004
Assignee:
3-30-2, SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN
Correspondent:
MORGAN & FINNEGAN, L.L.P.
MATTHEW K. BLACKBURN
3 WORLD FINANCIAL CENTER
NEW YORK, NY 10281-2101

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