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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/13/2006
Application #:
10495641
Filing Dt:
05/17/2004
Publication #:
Pub Dt:
01/13/2005
Inventors:
Kazuhiko Sugiyama, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Toyomi Uenoyama
Title:
METHOD OF SUPPLYING DIVIDED GAS TO A CHAMBER FROM A GAS SUPPLY APPARATUS EQUIPPED WITH A FLOW-RATE CONTROL SYSTEM
Assignment: 1
Reel/Frame:
016025/0636Recorded: 04/06/2005Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/31/2004
Exec Dt:
03/31/2004
Exec Dt:
03/31/2004
Exec Dt:
03/31/2004
Exec Dt:
03/31/2004
Assignees:
3-2, ITACHIBORI 2-CHOME, NISHI-KU
OSAKA-SHI, OSAKA 550-0012, JAPAN
3-6, AKASAKA
5-CHOME, MINATO-KU, TOKYO 107-0052, JAPAN
Correspondent:
GRIFFIN & SZIPL, P.C.
SUITE PH-1
2300 NINTH STREET SOUTH
ARLINGTON, VIRGINIA 22204

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