Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10883823
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Filing Dt:
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07/06/2004
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Publication #:
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Pub Dt:
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01/13/2005
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Inventors:
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Thin Van Luu, Bernd Jungmann, Detlef Michelsson
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Title:
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Method for defect segmentation in features on semiconductor substrates
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ERNST-LEITZ-STRASSE 17-37 |
| D-35578 WETZLAR, GERMANY |
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| FOLEY & LARDNER LLP |
| GLENN LAW |
| WASHINGTON HARBOUR |
| 3000 K STREET, N.W., SUITE 500 |
| WASHINGTON, D.C. 20007-5143 |
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