Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10870309
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Filing Dt:
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06/16/2004
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Publication #:
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Pub Dt:
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01/27/2005
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Inventors:
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Hee-Hwan Choe, In-Ho Song, Sung-Chul Kang, Sang-Gab Kim
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Title:
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Apparatus and method for cleaning of semiconductor device manufacturing equipment
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416, MAETAN-DONG, YEONGTONG-GU |
| SUWON-SI |
| GYEONGGI-DO, KOREA, REPUBLIC OF |
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| DAVID W. HEID |
| MACPHERSON, KWOK CHEN & HEID LLP |
| 1762 TECHNOLOGY DRIVE |
| SUITE 226 |
| SAN JOSE, CA 95110 |
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