Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10485721
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Filing Dt:
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01/30/2004
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Publication #:
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Pub Dt:
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01/27/2005
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Inventors:
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Jun Sonobe, Yoshikuni Koruda, Regis Zils, Yukinobu Nishikawa, Minoru Ino, Takako Kimura
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Title:
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Method and apparatus for cleaning and method and apparatus for etching
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 75 QUAI D'ORSAY |
| 75321 PARIS, CEDEX 07, FRANCE |
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| LINDA K. RUSSELL |
| 2700 POST OAK BLVD., STE. 1800 |
| HOUSTON, TX 77056 |
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