Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/28/2006
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Application #:
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10649351
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Filing Dt:
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08/26/2003
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Publication #:
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Pub Dt:
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02/10/2005
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Inventors:
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Sang-Hyeob Lee, Karl B. Levy, Aaron R. Fellis, Panya Wongsenakhum, Juwen Gao et al
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Title:
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METHOD FOR REDUCING TUNGSTEN FILM ROUGHNESS AND IMPROVING STEP COVERAGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| BEYER WEAVER & THOMAS LLP |
| P.O. BOX 778 |
| BERKELEY, CA 94704-0778 |
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