Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10910308
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Filing Dt:
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08/04/2004
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Publication #:
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Pub Dt:
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02/10/2005
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Inventors:
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Takeru Watanabe, Tsunehiro Nishi, Kenji Funatsu, Takao Yoshihara
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Title:
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Resist polymer, resist composition and patterning process
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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6-1 OTEMACHI 2-CHOME, CHIYODA-KU |
TOKYO, JAPAN |
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BIRCH, STEWART, KOLASCH & BIRCH, LLP |
GERALD M. MURPHY |
8110 GATEHOUSE RD. |
SUITE 100 EAST |
FALLS CHURCH, VA 22040-0747 |
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