Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10959585
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Filing Dt:
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10/07/2004
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Publication #:
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Pub Dt:
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02/24/2005
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Inventors:
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Shoichiro Matsuyama, Masanobu Honda, Kazuya Nagaseki, Hisataka Hayashi
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Title:
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Plasma etching method and plasma etching unit
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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| SMITH, GAMBRELL & RUSSELL |
| MICHAEL A. MAKUCH |
| 1850 M STREET, N.W., SUITE 800 |
| WASHINGTON, DC 20036 |
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