Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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06/12/2007
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Application #:
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10918381
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Filing Dt:
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08/16/2004
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Publication #:
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Pub Dt:
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03/03/2005
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Inventors:
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Maki Tanaka, Hidetoshi Morokuma, Chie Shishido, Yuji Takagi
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Title:
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APPARATUS FOR INSPECTING THREE DIMENSIONAL SHAPE OF A SPECIMEN AND METHOD OF WATCHING AN ETCHING PROCESS USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHISHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT ET.AL. |
| ALAN E. SCHIAVELLI |
| 1300 NORTH 17TH STREET-SUITE 1800 |
| ARLINGTON, VA 22209 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT CONVEYING PARTY, PREVIOUSLY RECORDED AT REEL 015988, FRAME 0352.
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| 24-14, NISHISHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH 17TH STREET - SUITE 1800 |
| ARLINGTON, VA 22209 |
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Assignment:
3
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CHANGE OF NAME AND ADDRESS
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| 17-1, TORANOMON 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| MATTINGLY & MALUR PC |
| 1800 DIAGONAL ROAD |
| SUITE 210 |
| ALEXANDRIA, VA 22314 |
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