Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/06/2006
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Application #:
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10665099
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Filing Dt:
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09/17/2003
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Publication #:
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Pub Dt:
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03/17/2005
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Inventors:
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Cem Basceri, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Lyle D. Breiner et al
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Title:
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MICROFEATURE WORKPIECE PROCESSING APPARATUS AND METHODS FOR CONTROLLING DEPOSITION OF MATERIALS ON MICROFEATURE WORKPIECES INCLUDING AFTER PRECURSOR STEP REDUCING THE PRESSURE IN THE CHAMBER BY AT LEAST 90% DURING PURGING STEP
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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8000 SOUTH FEDERAL WAY |
P.O. BOX 6 |
BOISE, IDAHO 83706-9632 |
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PERKINS COIE LLP |
EDWARD S. HOTCHKISS |
P.O. BOX 1247 |
SEATTLE, WA 98111-1247 |
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