Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/01/2008
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Application #:
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10495563
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Filing Dt:
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11/15/2004
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Publication #:
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Pub Dt:
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04/14/2005
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Inventors:
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Yoshiki Fukuzaki, Tomoyuki Shitaku
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Title:
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WAFER POSITIONING METHOD AND DEVICE, WAFER PROCESS SYSTEM, AND WAFER SEAT ROTATION AXIS POSITIONING METHOD FOR WAFER POSITIONING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1588-2, AZA-MICHINOUE |
| KANNABE-CHO, FUKAYASU-GUN |
| HIROSHIMA 720-2104, JAPAN |
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| THOMAS J. D'AMICO |
| DICKSTEIN SHAPIRO MORIN & OSHINSKY LLP |
| 2101 L STREET, NW |
| WASHINGTON, DC 20037-1526 |
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