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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/31/2006
Application #:
10967284
Filing Dt:
10/19/2004
Publication #:
Pub Dt:
04/14/2005
Inventors:
Shintaro Aoyama, Masanobu Igeta, Hiroshi Shinriki
Title:
SUBSTRATE PROCESSING METHOD AND A COMPUTER READABLE STORAGE MEDIUM STORING A PROGRAM FOR CONTROLLING SAME
Assignment: 1
Reel/Frame:
015899/0790Recorded: 10/19/2004Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/08/2004
Exec Dt:
09/08/2004
Exec Dt:
09/08/2004
Assignee:
3-6, AKASAKA 5-CHOME
MINATO-KU
TOKYO 107-8481, JAPAN
Correspondent:
OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST
1940 DUKE STREET
ALEXANDRIA, VA 22314

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