Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/01/2008
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Application #:
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10978150
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Filing Dt:
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10/29/2004
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Publication #:
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Pub Dt:
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04/28/2005
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Inventors:
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Katsuhisa Yuda, Hiroshi Nogami
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Title:
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REMOTE PLASMA APPARATUS FOR PROCESSING SUBSTRATE WITH TWO TYPES OF GASES
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Assignment:
1
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 2-5-1 KURIGI, ASAO-KU |
| KAWASAKI-SHI, KANAGAWA, JAPAN |
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| NORMAN P. SOLOWAY |
| 3450 E. SUNRISE DRIVE, SUITE 140 |
| TUCSON, AZ 85718 |
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