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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/06/2007
Application #:
10919583
Filing Dt:
08/17/2004
Publication #:
Pub Dt:
04/28/2005
Inventors:
Udo Dinger, Hans-Juergen Mann, Joerg Schultz, Karl-Heinz Schuster, Wolfgang Singer et al
Title:
ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY
Assignment: 1
Reel/Frame:
016107/0956Recorded: 12/27/2004Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/10/2004
Exec Dt:
10/21/2004
Exec Dt:
10/14/2004
Exec Dt:
11/18/2004
Exec Dt:
10/07/2004
Exec Dt:
10/07/2004
Exec Dt:
11/18/2004
Exec Dt:
10/12/2004
Assignee:
CARL-ZEISS-STRASSE 22
73447 OBERKOCHEN, GERMANY
Correspondent:
OHLANDT, GREELEY, RUGGIERO & PERLE, LLP
ONE LANDMARK SQUARE, 10TH FLOOR
STAMFORD, CT 06901

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