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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10773245
Filing Dt:
02/09/2004
Publication #:
Pub Dt:
05/19/2005
Inventors:
Yasuharu Sasaki, Tsuyoshi Moriya, Hiroshi Nagaike
Title:
Plasma processing apparatus, ring member and plasma processing method
Assignment: 1
Reel/Frame:
015587/0464Recorded: 07/20/2004Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/15/2004
Exec Dt:
03/15/2004
Exec Dt:
03/15/2004
Assignee:
3-6, AKASAKA 5-CHOME
MINATO-KU, TOKYO, JAPAN 107-8481
Correspondent:
OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST
1940 DUKE STREET
ALEXANDRIA, VA 22314

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