Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/15/2008
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Application #:
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10499417
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Filing Dt:
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12/06/2004
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Publication #:
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Pub Dt:
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05/19/2005
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Inventors:
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Rodger Fehlhaber, Helmut Tews
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Title:
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RESISTLESS LITHOGRAPHY METHOD FOR FABRICATING FINE STRUCTURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST. MARTIN-STR. 53 |
| 81669 MUNICH, GERMANY |
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| BRINKS HOFER GILSON ET AL. |
| P.O. BOX 10395 |
| CHICAGO, IL 60610 |
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