Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10890034
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Filing Dt:
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07/12/2004
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Publication #:
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Pub Dt:
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05/19/2005
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Inventors:
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Daniel J. Hoffman, Diana Xiaobing Ma, Yan Ye, Jang Gyoo Yang
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Title:
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Plasma chamber having multiple RF source frequencies
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 450-A |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIED MATERIALS, INC. |
KEITH P. TABOADA, ESQ. |
PATENT COUNSEL |
P.O. BOX 450-A |
SANTA CLARA, CA 95052 |
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